A metrology microscope that measures a wide variety of areas based on high precision

 

 

MM400 single lens manual type	MM400 Universal Manual Type (Revolver Type)

 

 

 

Tool Microscope Stage (MM400 / MM800)

 

 

MM800 Stage   - Measuring distance: 300 x 200mm (12" x 8")   - Measuring distance: 250 x 150mm (10" x 6")   - Measuring distance: 200 x 150mm (8" x 6")
MM400 / 800 Stage   - Measuring distance: 150 x 100mm (6" x 4")   - Measuring distance: 100 x 100mm (4" x 4")   - Measuring distance: 50 x 50mm (2" x 2")

 

 

 

 

 

 

High-performance objective CFI60-2: Universal (revolver) type

 

- High NA value and long operating distance   - Lenses of various magnifications from 1x to 150x   - Improvement of chromatic aberration correction

 

 

 

 

High-performance objectives: single lens type

 

Telecentric Lens    - The boundary of the sample is recognized exactly without distortion.

 

 

Scale	1x	3x	5x	10x	20x	50x	100x
Operating distance (mm)	79	75	64	48	20	15	4

 

 

 

 

 

 

Fast and accurate focusing

 

Focusing Aid (FA)

- Directly fit the shape of the wrong Focusing Aid, so you can find the exact focus location.

- You can reduce the error between the operators as much as possible.

 

 

TTL Laser Auto-Focus

- This is the first measurement microscope to be configured to auto-focus using a TTL laser.

- This laser autofocus system achieves a repeatability of 0.5um at a focusing speed of 0.5 seconds.

(Based on 0.75um laser spot on 20x objectives)

 

 

 

 

 

 

Electric Z-axis stand

 

- The electric stand of 10mm/sec (speed adjustable) can be configured, and fine-tuning is also possible via a dedicated controller.

 

 

 

 

 

E-MAX data processing software

 

 

 

Digital image measurement is realized by the combination of new video head and E-MAX program   - Navigation function for repeated measurement     - Easy editing and control with a variety of measurement recipes   - Automatic color detection with high precision   - Powerful reporting

 

8 Split LED Light Source

 

 

 

8-split LED ring lighting   - Resin molding products that are difficult to observe with normal coaxial lighting Easy to detect edge   - Incident angle 30 degrees 8 split on/off method   - For measuring-only objectives 1x, 3x, 5x, 10x

Data Processing Unit (DP-E1)

 

 

 

A wide range of functions and easy-to-use data processor units   - Improve work efficiency with counter-integrated   - 320 x 240 pixels of LCD LCD adoption   - Easy-to-use measurement button   - Measuring recipes can be registered   - Store data on a USB memory