- Non Destructive inspection of Semiconductor, Wafer, Flip chip PKG
- Defect insspection off MEMS, LED, WLP, CSP...
- Simplified Measurement of CD, L/S
- Use NIR Light source (1127 nm, optimized at Si wafer)
- 150x150 mm stroke (User customizing)
- 5 Slots manual/ motirized Revolver